A. Outline:
I. Physics of Semiconductors
1. Solid State Materials
2. PN junction
3. Bipolar and MOS Transistor
II Semiconductor Processing
1. Crystal Growth
2. Dopant Diffusion and Ion Implantation
3. Thin Film Deposition
4. Photolithography
5. Etching
6. Fabrication of Bipolar and MOS Devices
B. References:
I. `Fundamentals of Microelectronic Processing`, by Hong H. Lee, McGraw-Hill (1990)
II. `Semiconductor devices-Physics and Technology`, by S. M. Sze, Bell Telephone Lab., Inc (1985)
C. Grading: Homework: 30%; Mid-term Exam.: 30%; Final Exam.: 40%
D. Pre-requiste courses: General Physics, General Chemistry, Transport Phenomena, Reaction Engineering

Text Book
半導體製程概論(中文)
歐亞書局 Hong Xiao 著 羅正忠,張鼎張 譯